Wireless Multifunctional Surface Acoustic Wave Sensor for Magnetic Field and Temperature Monitoring
نویسندگان
چکیده
A one-port surface acoustic wave (SAW) resonator based on Co40–Fe40–B20/SiO2/ZnO/quartz multilayer structure and exhibiting a dual mode, Rayleigh Love modes, is investigated to achieve multifunctional sensor measuring both temperatures magnetic fields. The mode of the used for temperature measurement with sensitivity ?37.9 ppm/°C, field measurement. Co40-Fe40-B20 sensitive layer, quartz crystal piezoelectric substrate. ZnO film also but considered here in combination SiO2 as insulating layers serves control impedance matching dependence sensor. thicknesses are selected realize compensation making this highly fields insensitive temperatures. sensitivities ?170.4 kHz m?1 T?1 ?621.6 obtained respectively fundamental third harmonic mode. proposed beneficial design reliable hybrid SAW sensors.
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ژورنال
عنوان ژورنال: Advanced materials and technologies
سال: 2021
ISSN: ['2365-709X']
DOI: https://doi.org/10.1002/admt.202100860